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High-sensitivity, Low-noise Multi-axis Capacitive Micro-accelerometers - For inertial sensing applications - Chae, Junseok
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Chae, Junseok:
High-sensitivity, Low-noise Multi-axis Capacitive Micro-accelerometers - For inertial sensing applications - Livres de poche

2009, ISBN: 9783639184280

[ED: Taschenbuch / Paperback], [PU: VDM Verlag Dr. Müller], High performance, micro-g resolution, small size, low cost, low power accelerometers are needed in many applications such as inertial navigation, Unmanned Aerial Vehicles (UAVs), and GPS augmentation. Several sensing methods have been used, including piezoresistive/electric, resonant, tunneling, and capacitive techniques. Capacitive sensing has several advantages in terms of high sensitivity, stable DC-characteristics, low power dissipation, low temperature sensitivity, and low noise floor. This research work demonstrates full functionality of high- sensitivity, low-noise capacitive multi-axis accelerometers. In order to achieve micro-g resolution, two different structures have been utilized: a Silicon-On-Glass (SOG) accelerometer, and an all-silicon accelerometer. A monolithic fabrication technique for Post-CMOS MEMS is also developed. Finally, a 3-axis single-chip accelerometer is presented. The 3-axis accelerometer shows 3pF/g sensitivity and sub- g/rtHz mechanical noise floor. The 3-axis accelerometer with the readout circuit provides noise floor of 1.6 g/rtHz and 1.1 g/rtHz for in-plane and out-of- plane devices, respectively., DE, [SC: 0.00], Neuware, gewerbliches Angebot, 180, [GW: 250g], Selbstabholung und Barzahlung, PayPal, offene Rechnung, Banküberweisung, Transporte marítimo internacional

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High-sensitivity, Low-noise Multi-axis Capacitive Micro-accelerometers - For inertial sensing applications - Chae, Junseok
Livre non disponible
(*)
Chae, Junseok:
High-sensitivity, Low-noise Multi-axis Capacitive Micro-accelerometers - For inertial sensing applications - Livres de poche

2009, ISBN: 9783639184280

[ED: Taschenbuch / Paperback], [PU: VDM Verlag Dr. Müller], High performance, micro-g resolution, small size, low cost, low power accelerometers are needed in many applications such as inertial navigation, Unmanned Aerial Vehicles (UAVs), and GPS augmentation. Several sensing methods have been used, including piezoresistive/electric, resonant, tunneling, and capacitive techniques. Capacitive sensing has several advantages in terms of high sensitivity, stable DC-characteristics, low power dissipation, low temperature sensitivity, and low noise floor. This research work demonstrates full functionality of high- sensitivity, low-noise capacitive multi-axis accelerometers. In order to achieve micro-g resolution, two different structures have been utilized: a Silicon-On-Glass (SOG) accelerometer, and an all-silicon accelerometer. A monolithic fabrication technique for Post-CMOS MEMS is also developed. Finally, a 3-axis single-chip accelerometer is presented. The 3-axis accelerometer shows 3pF/g sensitivity and sub- g/rtHz mechanical noise floor. The 3-axis accelerometer with the readout circuit provides noise floor of 1.6 g/rtHz and 1.1 g/rtHz for in-plane and out-of- plane devices, respectively., DE, [SC: 0.00], Neuware, gewerbliches Angebot, 180, [GW: 250g], Selbstabholung und Barzahlung, PayPal, offene Rechnung, Banküberweisung, Interntationaler Versand

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High-sensitivity, Low-noise Multi-axis Capacitive Micro-accelerometers - For inertial sensing applications - Chae, Junseok
Livre non disponible
(*)
Chae, Junseok:
High-sensitivity, Low-noise Multi-axis Capacitive Micro-accelerometers - For inertial sensing applications - Livres de poche

2009, ISBN: 9783639184280

[ED: Taschenbuch / Paperback], [PU: VDM Verlag Dr. Müller], High performance, micro-g resolution, small size, low cost, low power accelerometers are needed in many applications such as inertial navigation, Unmanned Aerial Vehicles (UAVs), and GPS augmentation. Several sensing methods have been used, including piezoresistive/electric, resonant, tunneling, and capacitive techniques. Capacitive sensing has several advantages in terms of high sensitivity, stable DC-characteristics, low power dissipation, low temperature sensitivity, and low noise floor. This research work demonstrates full functionality of high- sensitivity, low-noise capacitive multi-axis accelerometers. In order to achieve micro-g resolution, two different structures have been utilized: a Silicon-On-Glass (SOG) accelerometer, and an all-silicon accelerometer. A monolithic fabrication technique for Post-CMOS MEMS is also developed. Finally, a 3-axis single-chip accelerometer is presented. The 3-axis accelerometer shows 3pF/g sensitivity and sub- g/rtHz mechanical noise floor. The 3-axis accelerometer with the readout circuit provides noise floor of 1.6 g/rtHz and 1.1 g/rtHz for in-plane and out-of- plane devices, respectively., DE, [SC: 3.70], Neuware, gewerbliches Angebot, 180, [GW: 250g], Selbstabholung und Barzahlung, PayPal, offene Rechnung, Banküberweisung, Internationaler Versand

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High-sensitivity, Low-noise Multi-axis Capacitive Micro-accelerometers - For inertial sensing applications - Chae, Junseok
Livre non disponible
(*)
Chae, Junseok:
High-sensitivity, Low-noise Multi-axis Capacitive Micro-accelerometers - For inertial sensing applications - Livres de poche

2009, ISBN: 9783639184280

[ED: Taschenbuch / Paperback], [PU: VDM Verlag Dr. Müller], High performance, micro-g resolution, small size, low cost, low power accelerometers are needed in many applications such as inertial navigation, Unmanned Aerial Vehicles (UAVs), and GPS augmentation. Several sensing methods have been used, including piezoresistive/electric, resonant, tunneling, and capacitive techniques. Capacitive sensing has several advantages in terms of high sensitivity, stable DC-characteristics, low power dissipation, low temperature sensitivity, and low noise floor. This research work demonstrates full functionality of high- sensitivity, low-noise capacitive multi-axis accelerometers. In order to achieve micro-g resolution, two different structures have been utilized: a Silicon-On-Glass (SOG) accelerometer, and an all-silicon accelerometer. A monolithic fabrication technique for Post-CMOS MEMS is also developed. Finally, a 3-axis single-chip accelerometer is presented. The 3-axis accelerometer shows 3pF/g sensitivity and sub- g/rtHz mechanical noise floor. The 3-axis accelerometer with the readout circuit provides noise floor of 1.6 g/rtHz and 1.1 g/rtHz for in-plane and out-of- plane devices, respectively., DE, [SC: 0.00], Neuware, gewerbliches Angebot, 180, [GW: 250g], Selbstabholung und Barzahlung, PayPal, offene Rechnung, Banküberweisung, Internationaler Versand

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High-sensitivity, Low-noise Multi-axis Capacitive Micro-accelerometers - Junseok Chae
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Junseok Chae:
High-sensitivity, Low-noise Multi-axis Capacitive Micro-accelerometers - nouveau livre

ISBN: 9783639184280

ID: 0d8794849ec7b8f594b07143279c8d79

High performance, micro-g resolution, small size, low cost, low power accelerometers are needed in many applications such as inertial navigation, Unmanned Aerial Vehicles (UAVs), and GPS augmentation. Several sensing methods have been used, including piezoresistive/electric, resonant, tunneling, and capacitive techniques. Capacitive sensing has several advantages in terms of high sensitivity, stable DC-characteristics, low power dissipation, low temperature sensitivity, and low noise floor. This research work demonstrates full functionality of high- sensitivity, low-noise capacitive multi-axis accelerometers. In order to achieve micro-g resolution, two different structures have been utilized: a Silicon-On-Glass (SOG) accelerometer, and an all-silicon accelerometer. A monolithic fabrication technique for Post-CMOS MEMS is also developed. Finally, a 3-axis single-chip accelerometer is presented. The 3-axis accelerometer shows 3pF/g sensitivity and sub- g/rtHz mechanical noise floor. The 3-axis accelerometer with the readout circuit provides noise floor of 1.6 g/rtHz and 1.1 g/rtHz for in-plane and out-of- plane devices, respectively. Bücher / Naturwissenschaften, Medizin, Informatik & Technik / Technik, [PU: VDM Verlag Dr. Müller, Saarbrücken]

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Détails sur le livre
High-sensitivity, Low-noise Multi-axis Capacitive Micro-accelerometers

High performance, micro-g resolution, small size, low cost, low power accelerometers are needed in many applications such as inertial navigation, Unmanned Aerial Vehicles (UAVs), and GPS augmentation. Several sensing methods have been used, including piezoresistive/electric, resonant, tunneling, and capacitive techniques. Capacitive sensing has several advantages in terms of high sensitivity, stable DC-characteristics, low power dissipation, low temperature sensitivity, and low noise floor. This research work demonstrates full functionality of high- sensitivity, low-noise capacitive multi-axis accelerometers. In order to achieve micro-g resolution, two different structures have been utilized: a Silicon-On-Glass (SOG) accelerometer, and an all-silicon accelerometer. A monolithic fabrication technique for Post-CMOS MEMS is also developed. Finally, a 3-axis single-chip accelerometer is presented. The 3-axis accelerometer shows 3pF/g sensitivity and sub-µg/rtHz mechanical noise floor. The 3-axis accelerometer with the readout circuit provides noise floor of 1.6µg/rtHz and 1.1µg/rtHz for in-plane and out-of- plane devices, respectively.

Informations détaillées sur le livre - High-sensitivity, Low-noise Multi-axis Capacitive Micro-accelerometers


EAN (ISBN-13): 9783639184280
ISBN (ISBN-10): 3639184289
Version reliée
Livre de poche
Date de parution: 2009
Editeur: Vdm Verlag Aug 2009

Livre dans la base de données depuis 16.02.2007 21:19:05
Livre trouvé récemment le 01.11.2017 09:00:43
ISBN/EAN: 3639184289

ISBN - Autres types d'écriture:
3-639-18428-9, 978-3-639-18428-0


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