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Soft X-Rays and Extreme Ultraviolet Radiation - David Attwood
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David Attwood:
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Principles and Applications This detailed, comprehensive book describes the fundamental properties of soft X-rays and extreme ultraviolet (EUV) radiation and discusses their applications in a wide variety of fields, including EUV lithography for semiconductor chip manufacture and soft X-ray biomicroscopy. The author begins by presenting the relevant basic principles such as radiation and scattering, wave propagation, diffraction, and coherence. He then goes on to examine a broad range of phenomena and applications. The topics covered include spectromicroscopy, EUV astronomy, synchrotron radiation, and soft X-ray lasers. The author also provides a wealth of useful reference material such as electron binding energies, characteristic emission lines and photo-absorption cross-sections. The book will be of great interest to graduate students and researchers in engineering, physics, chemistry, and the life sciences. It will also appeal to practising engineers involved in semiconductor fabrication and materials science. Bücher / Fremdsprachige Bücher / Englische Bücher 978-0-521-02997-1, Cambridge University Press

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Soft X-Rays and Extreme Ultraviolet Radiation - David Attwood
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David Attwood:
Soft X-Rays and Extreme Ultraviolet Radiation - nouveau livre

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This detailed, comprehensive book describes the fundamental properties of soft X-rays and extreme ultraviolet (EUV) radiation and discusses their applications in a wide variety of fields, including EUV lithography for semiconductor chip manufacture and soft X-ray biomicroscopy. The author begins by presenting the relevant basic principles such as radiation and scattering, wave propagation, diffraction, and coherence. He then goes on to examine a broad range of phenomena and applications. The topics covered include spectromicroscopy, EUV astronomy, synchrotron radiation, and soft X-ray lasers. The author also provides a wealth of useful reference material such as electron binding energies, characteristic emission lines and photo-absorption cross-sections. The book will be of great interest to graduate students and researchers in engineering, physics, chemistry, and the life sciences. It will also appeal to practising engineers involved in semiconductor fabrication and materials science. Principles and Applications Buch (fremdspr.) Bücher>Fremdsprachige Bücher>Englische Bücher, Cambridge University Press

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Soft X-Rays and Extreme Ultraviolet Radiation: Principles and Applications - David Attwood
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Soft X-Rays and Extreme Ultraviolet Radiation: Principles and Applications - Livres de poche

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Soft X-Rays and Extreme Ultraviolet Radiation: Principles and Applications - David Attwood
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Soft X-Rays and Extreme Ultraviolet Radiation: Principles and Applications - Livres de poche

2007, ISBN: 052102997X

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Détails sur le livre
Soft X-Rays and Extreme Ultraviolet Radiation: Principles and Applications
Auteur:

Attwood, David

Titre:

Soft X-Rays and Extreme Ultraviolet Radiation: Principles and Applications

ISBN:

This detailed, comprehensive book describes the fundamental properties of soft X-rays and extreme ultraviolet (EUV) radiation and discusses their applications in a wide variety of fields, including EUV lithography for semiconductor chip manufacture and soft X-ray biomicroscopy. The author begins by presenting the relevant basic principles such as radiation and scattering, wave propagation, diffraction, and coherence. He then goes on to examine a broad range of phenomena and applications. The topics covered include spectromicroscopy, EUV astronomy, synchrotron radiation, and soft X-ray lasers. The author also provides a wealth of useful reference material such as electron binding energies, characteristic emission lines and photo-absorption cross-sections. The book will be of great interest to graduate students and researchers in engineering, physics, chemistry, and the life sciences. It will also appeal to practising engineers involved in semiconductor fabrication and materials science.

Informations détaillées sur le livre - Soft X-Rays and Extreme Ultraviolet Radiation: Principles and Applications


EAN (ISBN-13): 9780521029971
ISBN (ISBN-10): 052102997X
Livre de poche
Date de parution: 2007
Editeur: CAMBRIDGE UNIV PR
470 Pages
Poids: 0,866 kg
Langue: eng/Englisch

Livre dans la base de données depuis 29.05.2007 09:45:08
Livre trouvé récemment le 11.03.2017 17:52:59
ISBN/EAN: 052102997X

ISBN - Autres types d'écriture:
0-521-02997-X, 978-0-521-02997-1


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